Kurt J. Lesker ‘ALD/PVD/Vacuum’ Technology Workshop
Institute for Matter and Systems
Georgia Institute of Technology
Date: March 12th, 2025 – March 13th, 2025 (EST)
Location: Marcus Nanotechnology Building, Georgia Tech, Atlanta
March 12th, 2025
- 08:00 am – 08:30 am……………………………Registration and Coffee
- 08:30 am – 08:45 am……………………………IMS Welcome
- 08:45 am – 09:00 am……………………………Kurt J. Lesker Product Profile
- 09:00 am – 10:30 am……………………………Overview of PVD Technologies and Sputter Process Development (Nick Franzer, Kurt J. Lesker)
- 10:30 am – 10:50 am……………………………Vanadium Dioxide-Based Ultra-Wideband and Wide-Angle Reconfigurable Metasurface Absorber (Hamed Abiri, Georgia Tech)
- 10:50 am – 11:10 am……………………………Coffee break
- 11:10 am – 11:30 am……………………………Understanding The Role Of Dielectric Layer In Ferroelectric Gate Stacks for QLC-enabled FE-NAND memory (Lance Fernades, Georgia Tech)
- 11:30 am – 12:30 pm…………………………..Invited Talk: Atomic Layer Infiltration (ALI) for Synthesizing Hybrid Materials: Fundamentals and Process Kinetics (Prof. Mark Losego, Georgia Tech)
- 12:30 pm – 01:30 pm…………………………….Lunch/Kurt J. Lesker booth visit
- 01:30 pm – 01:50 pm…………………………….First Demonstration of High Performance and Extremely Stable W-doped In2O3 Gate-All-Around Nanosheet FET (Eknath Sarkar, Georgia Tech)
- 01:50 pm – 03:50 pm…………………………….R&D on New Materials for ALD Tools (Noel O’Toole, Kurt J. Lesker)
- 03:50 pm – 04:00 pm…………………………….Closing Remarks
- 04:00 pm – 05:00 pm…………………………….Q/A & Consultations with Kurt J. Lesker/ IMS Cleanroom Tour
March 13th, 2025
Vacuum Technology Course (Speaker: J.R. Gaines, Technical Director of Education, Kurt J. Lesker)
- 08:30 am – 09:00 am…………………………….Registration and Coffee
- 09:00 am – 10:00 am…………………………….Fundamentals and Applications of Vacuum Science
- 10:00 am – 11:00 am…………………………….Advanced Concepts in Vacuum Science and Technology
- 11:00 am – 12:00 pm…………………………….Vacuum Pumping Technologies and System Characterization
- 12:00 pm – 01:00 pm…………………………….Lunch/Kurt J. Lesker booth visit
- 01:00 pm – 02:00 pm…………………………….Vacuum System Integrity, Measurement, and Performance
- 02:00 pm – 03:00 pm…………………………….Contamination Control, Cleaning, and Leak Detection in Vacuum Systems
- 03:00 pm – 04:00 pm…………………………….Q/A & Consultations with Kurt J. Lesker/ IMS Cleanroom Tour